Grazing-Exit X-ray Analysis

are needed. Since the analysis depth depends on the accelerating voltage of the electron beam, the application of low accelerating voltages limits the characteristic-X-ray generation region to a minute region near the specimen surface. However, the energies of the X-rays are less than those of the accelerated electrons; this causes a new problem: the use of analytical X-ray lines is limited. This is particularly serious for SEM-EDS that has low energy resolution. The next section introduces the grazingexit X-ray analysis method, which has the possibility for improving the analysis region and micro-volume analysis.